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2010/02/16 14:34:40瀏覽604|回應3|推薦7 | |
The Fault Detection and Classification (FDC) and Model-Based Process Control (MBPC) are used to address those shortcomings. When a problem is detected, controller can determine whether to adjust the process parameters or to stop the processing of subsequent wafers. |
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( 知識學習|科學百科 ) |